Materials Science & Technology: A Comprehensive Treatment Volume 16 - Processing of Semiconductors
This is the first in-depth, topic-oriented reference work devoted to this growing interdisciplinary field. A compendium of current, state-of-the-art information, it covers the most important classes of materials: metals, ceramics, glasses, polymers, semi-conductors, and composites. Each volume deals with properties, processing, applications, or general phenomena associated with these materials. Edited by internationally renowned experts in materials science, this series is sure to establish itself as a seminal work.
| Author: |
Edited by K. A. Jackson |
| ISBN: |
3527268294 |
| Publisher: |
VCH-Wiley Publishing |
| Binding: |
Hardcover |
| Year Published: |
1995 |
| Back Cover: |
| Not Available |
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| Contents: |
* Silicon Processing
* Compound Semiconductor Processing
* Epitaxial Growth
* Photolithography
* Selective Doping
* Etching Processes in Semiconductor Manufacturing
* Silicon Device Structures
* Compound Semiconductor Device Structures
* Silicon Device Processing
* Compound Semiconductor Device Processing
* Integrated Circuit Packaging
* Interconnection Systems
* Index. |
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